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| 如何设计半导体制造设备 ——由半导体制造设备设计及制程原理（已过期） |
课程编号：29687 |
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| 上课时间： |
从 2008-06-26 09:30 到 2008-06-28 16:30 |
| 课程时长： |
16 小时 |
| 市 场 价： |
1800 元 |
| 淘 课 价： |
1800 元
（在淘课网用现金采购此课程，即获 2,700 淘币） 淘币细则 | 淘币换好礼
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| 淘币兑换： |
180,000 淘币
（若您有足够淘币，您也可以用淘币兑换此课程） 如何获取淘币
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| 开课地点： |
上海市
上海浦东新区张江高科技园区碧波路500号 |
| 人 气： |
19
发表评价
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| 课程类别： |
个人技能 其它 |
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电话咨询开课机构
报名热线： 021-61505199
培训受众
本科及以上理工科系毕业，具半导体设备维修、或工艺制程一年工作经验
课程收益
了解半导体制造设备设计及制程原理，进而请学员作设计及讨论。再探讨设备那一部份最容易故障，与如何下手做设备维修及保养。如何兼顾自身，其它人员安全。
课程内容
1. Simple semiconductor process introduction
1.0 Introduction to IC fabrication
1.1 Wafer manufacturing
1.2 Front end processes – Ion implantation and thermal process
1.3 Photolithography
1.4 Etch
1.5 CVD and dielectric thin film
1.6 Metallization
1.7 CMP process
2. Semiconductor process equipment design and process theories
2.1 Load and unload wafers
2.2 Thermal process – Furnace, RTP
2.3 Ion implantation -Implanter
2.4 Photolithography –Stepper
2.5 Etch – Wet and dry etchers
2.6 CVD – PE-CVD, W-CVD, LP-CVD, Epi
2.7 PVD
2.8 CMP
2.9 Sub-fab equipments – Scrubbers (burning and water-soluble) , pumps, gas alarm detectors
3. Homework of student equipment design and discussion
3.1 Check for all students’ equipment designs
3.2 Discuss the advantages and disadvantages for all students’ design
3.3 Q&A
4. Semiconductor process equipment troubleshooting
4.1 Troubleshooting tools and materials safety.
4.2 How to protect personnel’s and equipments’ safety.
4.3 Where to start for equipment troubleshooting?
4.4 How to read schematics
4.5 Troubleshooting
4.6 End of troubleshooting and recovering
5. Semiconductor process equipment maintenance
5.1 Maintenance schedule
5.2 Preparation before maintenance
5.3 How to protect personnel’s and equipments’ safety? Maintenance solvent, materials, tools safety.
5.4 Maintenance
5.5 End of maintaining and recovering
讲师介绍
Education:
Master degree in auto control Engineering
National ChiaTung University, Taiwan
Experience:
Medical instrument engineer for 3 years.
Semiconductor Equipment engineer, team leader, manager, specialist for 13 years.
Instructor of FXMC
Specializations：
1. How to train equipment engineers
2. How to modify, troubleshoot, maintain RTP, LP-CVD, DPN, Epi tools
3. Hold 4 patents for semiconductor process and equipment patents
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